General information

The conference will include plenary talks, invited talks, contributed talks and posters. Contributed talks and posters are refereed based on short abstracts.

Authors of accepted short abstracts will subsequently be required to submit extended abstracts for inclusion in the conference booklet. The extended abstract will also be published on IEEE Xplore Digital Library.

Afterwards, the authors are encouraged to submit their full paper to a special issue of Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena.