Plenary speakers

John Fielden, Dr., KLA-Tencor Co., USA:
Tentative title:
Semiconductor inspection and metrology challenges

Shiro Hara, Dr., AIST, Japan:
Tentative title:
Minimal fab− using half-inch wafers to reduce a fab investment to 1/1,000
Naoki Shinohara, Prof., Kyoto University, Japan:
Tentative title:
Phase Controlled magnetron technology for Wireless Power Transfer

Timetable for plenary talks will be announced later.
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