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Vacuum Technology (Session 8)

12 Jul 2017
15:45-16:45
Herzogssaal

Vacuum Technology (Session 8)

15:45 – 16:15
Invited

Miniaturized Vacuum Pumps and their Application
Jan Dziuban, Wrocław University of Technology, Poland
16:15 – 16:30
Contributed

Novel vacuum gauge based on an electron space charge compensation ion source
Mihail Granovskij, VACOM Vakuum Komponenten & Messtechnik GmbH, Germany
16:30 – 16:45
Contributed

Ultra-high vacuum leak detection technology with the lower limit of 10-16 Pam3/s for nano devices
Yaowen Lu, Beijing Orient Institute of Measurement and Test, P. R. China