Dr. Shiro Hara

In 1989, he joined Waseda Univ. where he was an Assistant Professor. He was a special researcher, basic science program in Riken Institute since 1990. In 1993, he became a researcher of Electrotechnical Laboratory, MITI. He developed a local clean research system to find elemental cause of variations of electronic device characteristics. From 2001 to 2002, he joined R&D Association for Future Electron Devices as General Manager of R&D Department and Director of Planning Office. In 2007, he proposed the Minimal Fab concept to reduce an investment cost of a semiconductor factory into 1/1000. He is the minimal system group leader in AIST, METI. Also, he is the representative of Fab System Research Consortium of AIST. During FY2012-2014, he promoted the national project on the development of minimal system as the project director.