Busta, Heinz

Heinz Busta received his BS in Physical Chemistry in 1968 from the Technical University in Graz, Austria and his PhD in Physics from Northwestern University, Evanston, IL in 1973. Until 2006 he worked in Industrial Research Labs such as the Gould Research Center (1976-1986), the Amoco Research Center (1986-1994), the David Sarnoff Research Center (1996-2001) and the Cabot Microelectronics Corporation (2001-2006) on the development of integrated circuits, flat panel displays, sensors, micro electromechanical systems (MEMS), vacuum microelectronics, and medical systems. In 2007, he organized the 20th IVNC in Chicago, IL and from 2009 until 2014 was the chairman of the International Steering Committee (ISC) of IVNC. After his retirement from Cabot he taught the Microfabrication and Microdevices Course at the University of Illinois at Chicago for several years. He published a review article (1992) and a book chapter (2001) on vacuum micro/nanoelectronics and is the inventor or co-inventor of 28 US patents.